When a direct current of I amperes is flowing in an electric circuit and the voltage across the circuit is V volts, then power, in watts P =VI Electrical energy = Power × time = VIt joules Although the unit of energy is the...
Category - Electrical
The unit of electric resistance is the ohm(Ω), where one ohm is one volt per ampere. It is defined as the resistance between two points in a conductor when a constant electric potential of one volt applied at the two points...
The unit of electric potential is the volt (V), where one volt is one joule per coulomb. One volt is defined as the difference in potential between two points in a conductor which, when carrying a current of one ampere...
End effectors require power to operate. They also require control signals to regulate their operation. The principal methods of transmitting power and control signal to the end effector...
A capacitor is broadly defined as two conductors that can hold opposite charges. It can be used as either a sensor or an actuator. If the distance and relative position between two conductors change as a result of applied...
Mechanical characteristics such as spring constants and resonant frequencies of beams and membranes can be changed by introducing strain. In this section, we focus on discussing methods for tuning characteristics of cantilever...
A MEMS system, including sensors and actuators, invariably consists of mass and supporting structures. The supporting mechanical elements (membranes, cantilever, or suspensions) provide elastic restoring spring...
Silicon, an element commonly found on sandy beaches and in window glasses, is the substrate of choice for building integrated circuits. Silicon belongs to a class of materials called semiconductors. which offers remarkable...
To following is a list of important issues to consider when evaluating an etching process. Etch rate. The speed of material removal is important. A higher etch rate translates into shorter etching time and greater manufacturing...
A basic understanding of the fabrication technology for integrated circuit, which precedes that of MEMS in history, is necessary to understanding the micromachining process. A reader who is familiar with the basic...
