End effectors require power to operate. They also require control signals to regulate their operation. The principal methods of transmitting power and control signal to the end effector...
Category - Electrical
A capacitor is broadly defined as two conductors that can hold opposite charges. It can be used as either a sensor or an actuator. If the distance and relative position between two conductors change as a result of applied...
Mechanical characteristics such as spring constants and resonant frequencies of beams and membranes can be changed by introducing strain. In this section, we focus on discussing methods for tuning characteristics of cantilever...
A MEMS system, including sensors and actuators, invariably consists of mass and supporting structures. The supporting mechanical elements (membranes, cantilever, or suspensions) provide elastic restoring spring...
Silicon, an element commonly found on sandy beaches and in window glasses, is the substrate of choice for building integrated circuits. Silicon belongs to a class of materials called semiconductors. which offers remarkable...
To following is a list of important issues to consider when evaluating an etching process. Etch rate. The speed of material removal is important. A higher etch rate translates into shorter etching time and greater manufacturing...
A basic understanding of the fabrication technology for integrated circuit, which precedes that of MEMS in history, is necessary to understanding the micromachining process. A reader who is familiar with the basic...
Plasma etching is a very prominent method of removing materials from a wafer surface. Since the process does not involve wet chemicals, it is often referred to as dry etching. The etching is carried out in a specialized process...
These galvanometers are of d’Arsonval type having a moving coil suspended between the pieces of a permanent magnet. When an alternating current is passed through the moving coil, an alternating deflecting torque is produced...
It consists of a single loop of thin phosphorbronze strip which forms the moving system. It is called a vibrator loop. The vibrator loop is situated in the field of a permanent magnet but when high sensitivities are required...
